TSV inspection module
Ultra high-speed TSV sensor head module
Function: sensing TSV depth; trench depth; oxide, nitride, PR, PI film thickness
Specifications：
Spot size (4 options):
- Model W5050: spot size 50μm
- Model W2525: spot size 25μm
- Model W0707: spot size 7μm
- Model W0735: spot size 7x35μm
TSV aspect ratio: >30 @ Top CD 3~5 μm
Film thickness range: 500 Å ~ 30 μm