TGV 3D Viewer
TGV 3D Viewer 是測量穿透玻璃通孔 (TGV) 側壁輪廓、粗糙度、頂部/中部/底部 CD、圓度、通孔軸垂直度和圓柱度的最佳解決方案。它是市場上最強大的非破壞性設備，能夠檢測雷射誘發的玻璃修飾缺陷（蝕刻前）、通孔蝕刻缺陷、中心偏移和通孔腰高變化。
n特色
n 適用於 TGV interposers 面板級檢測
n 對於 TGV 側壁形狀、粗糙度、真圓度等參數，進行非接觸和非破壞檢測
n 全自動檢測，易於和自動化生產線整合
n規格:
| System Model | TGV Viewer |
| Wafer size |
300 mm x 300 mm |
| Inspection items |
TGV, TCD/MCD/BCD, height, side wall profile and roughness, roundness, center deviation |
| Resolution*1 |
Lateral: 1 μm, Axial: 2.5 μm |
| Glass thickness*2 |
300 μm ~ 1100 μm |
| Light source |
LED & laser |
| Working distance (for multi lens) |
3 mm ~ 45 mm (depends on option module) |
| Lens |
2X, 4X (1X, 8X options) |
| Chuck |
Standard (or Customized) and vacuum |
| Air |
VAC -80k Pa，CDA 5~7 kg/cm^2 |
| System configuration |
XY(400x400 mm with 1 mm resolution) Z(14 mm with 1 mm resolution) |
| Electric discharger |
Option |
| Cleanliness |
Class 1000 |
| Networking |
Option |
| Main controller |
Windows 11 with height-speed USB, 4-port GbE card |
| System power |
220 VAC |
| Safety compatibility |
SEMI S2 compliant |
*Note 1,2 : Contact us for other specifications