TGV C100
Table-top TGV (Through Glass Via) metrology tool
Automatic TGV inspection system
nFeatures
nNon-contact tomography measurement
nView cross-sections of the glass via easily
nMeasure side wall angles without needing SEM
nSpecifications
|
Items |
Specifications |
|
量測孔徑 (min via diameter) |
30 μm (typical) |
|
量測深寬比(aspect ratio) |
10：1 |
|
橫向解析度(lateral resolution) |
≥0.5 μm |
|
深度解析度(depth resolution) |
≥ 1 μm |
|
量測視野(FOV) |
3 mm x 3 mm |
|
光源 (light source) |
wavelength optional (Laser) |
|
取像時間(inspection time) |
< 0.5 sec |
|
x-y 行程 (x-y Travel) |
200 mm x 200 mm |