TGV C100
The TGV C100 is a desktop TGV (Through Glass Through Hole) measurement tool, which is a very useful manual or semi-automatic TGV inspection system for development.
nFeatures
- Non-contact tomography measurement
- View cross-sections of the glass via easily
- Measure side wall angles without needing SEM
| Items | Specifications |
| 量測孔徑 (min via diameter) | 30 μm (typical) |
| 量測深寬比(aspect ratio) | 10：1 |
| 橫向解析度(lateral resolution) | ≥0.5 μm |
| 深度解析度(depth resolution) | ≥ 1 μm |
| 量測視野(FOV) | 3 mm x 3 mm |
| 光源 (light source) | wavelength optional (Laser) |
| 取像時間(inspection time) | < 0.5 sec |
| x-y 行程 (x-y Travel) | 200 mm x 200 mm |