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Metal pillar height inspection tool3
https://www.omsure.com/ OminiMeasure Technology
Home Products CMP Inspection Metal pillar height inspection tool
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Metal pillar height inspection tool

Metal pillar height inspection tool

Specifications

Objectives

10X, 20X, 50X
Field of View 74x74um2 ~ 440x440um2
Vertical scan range 100μm (optional: ~400μm)
Pillar extrusion height resolution(Vertical resolution) 10 nm
Lateral resolution 0.6 ~ 1.1μm
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